Inventor · disambiguated record
Sergiy Yulin
Also filed as: YULIN SERGIY
3 granted patents·17 citations·filing 2005–2017
62Inventor score
Files withFRAUNHOFER GES FORSCHUNG3
Top patents by PatentIndex Score
3 records- 0180US7920323B2Thermally stable multilayer mirror for the EUV spectral regionFRAUNHOFER GES FORSCHUNG·Filed 2005·Granted Apr 5, 2011·14 cites·22 claims
- 0258US11500137B2Multilayer mirror for reflecting EUV radiation and method for producing the sameFRAUNHOFER GES FORSCHUNG·Filed 2017·Granted Nov 15, 2022·0 cites·13 claims
- 0355US7986455B2Thermally stable multilayer mirror for the EUV spectral rangeFRAUNHOFER GES FORSCHUNG·Filed 2008·Granted Jul 26, 2011·3 cites·20 claims
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