Inventor
FEIGL TORSTEN
DE3 patents
Patents
3 patentsUS7920323B2Apr 5, 2011
Thermally stable multilayer mirror for the EUV spectral region
FRAUNHOFER GES FORSCHUNG14 citations79
US7986455B2Jul 26, 2011
Thermally stable multilayer mirror for the EUV spectral range
FRAUNHOFER GES FORSCHUNG3 citations53
US7173759B2Feb 6, 2007
Monochromator mirror for the EUV-spectral range
FRAUNHOFER GES FORSCHUNG1 citations45