Inventor · disambiguated record
Kyohei Seki
Also filed as: SEKI KYOHEI
13 granted patents·5 pending applications·124 citations·filing 1995–2019
91Inventor score
Top patents by PatentIndex Score
18 records- 0185US7072375B2Line-narrowed gas laser systemUSHIO ELECTRIC INC·Filed 2003·Granted Jul 4, 2006·21 cites·20 claims
- 0284US6879617B2Two stage laser systemKOMATSU MFG CO LTD·Filed 2003·Granted Apr 12, 2005·21 cites·17 claims
- 0380US7622727B2Extreme UV radiation source deviceUSHIO ELECTRIC INC·Filed 2006·Granted Nov 24, 2009·16 cites·9 claims
- 0476US6509970B1Wavelength monitoring apparatus for laser light for semiconductor exposureUSHIO ELECTRIC INC·Filed 2000·Granted Jan 21, 2003·22 cites·5 claims
- 0575US7756403B2Heating process of the light irradiation typeUSHIO ELECTRIC INC·Filed 2006·Granted Jul 13, 2010·5 cites·7 claims
- 0673US7459708B2Extreme UV radiation source device and method for eliminating debris which forms within the deviceUSHIO ELECTRIC INC·Filed 2006·Granted Dec 2, 2008·10 cites·3 claims
- 0770US7700899B2Heating device of the light irradiation typeUSHIO ELECTRIC INC·Filed 2006·Granted Apr 20, 2010·3 cites·8 claims
- 0868US7656079B2Heater and heating device with heaters with lamps having an independently powered multiple part filamentUSHIO ELECTRIC INC·Filed 2006·Granted Feb 2, 2010·3 cites·3 claims
- 0965US7535013B2Extreme UV radiation exposure tool and extreme UV radiation source deviceUSHIO ELECTRIC INC·Filed 2006·Granted May 19, 2009·2 cites·20 claims
- 1061US7912359B2Heating device of the light irradiation typeUSHIO ELECTRIC INC·Filed 2007·Granted Mar 22, 2011·1 cites·6 claims
- 1152US5677113AMethod for ashing a photoresist resin film on a semiconductor wafer and an asherUSHIO ELECTRIC INC·Filed 1995·Granted Oct 14, 1997·20 cites·2 claims
- 1250US10903609B2ConnectorFUJITSU COMPONENT LTD·Filed 2019·Granted Jan 26, 2021·0 cites·4 claims
- 1348US2009214193A1Light emission type heating method and light emission type heating apparatusUSHIO ELECTRIC INC·Filed 2009·Application pending·0 cites
- 1447US2009116824A1Light irradiation type heat treatment deviceUSHIO ELECTRIC INC·Filed 2008·Application pending·0 cites
- 1545US10154229B2Storage medium storing a video reproduction controlling program, video reproduction controlling apparatus and video reproduction controlling methodSATO NORIYUKI·Filed 2008·Granted Dec 11, 2018·0 cites·32 claims
- 1628US2009084992A1Method for generating extreme ultraviolet radiation and an extreme ultraviolet light source deviceUSHIO ELECTRIC INC·Filed 2008·Application pending·0 cites
- 1727US2008237501A1Extreme ultraviolet light source device and extreme ultraviolet radiation generating methodUSHIO ELECTRIC INC·Filed 2008·Application pending·0 cites
- 1827US2009127479A1Extreme ultraviolet light source device and a method for generating extreme ultraviolet radiationUSHIO ELECTRIC INC·Filed 2008·Application pending·0 cites
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