Inventor · disambiguated record
Nai-Han Cheng
Also filed as: CHENG NAI-HAN
39 granted patents·2 pending applications·67 citations·filing 2005–2024
96Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD25TAIWAN SEMICONDUCTOR MFG5CHENG NAI-HAN4HWANG CHIH-HONG3CHANG CHUN-LIN1
Top patents by PatentIndex Score
41 records- 0198US9859139B23D IC bump height metrology APCTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 2, 2018·17 cites·20 claims
- 0289US11060980B2Broadband wafer defect detectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 13, 2021·3 cites·20 claims
- 0388US11852593B2Broadband wafer defect detectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·1 cites·20 claims
- 0485US8709528B2Wafer processing method and system using multi-zone chuckCHENG NAI-HAN·Filed 2011·Granted Apr 29, 2014·6 cites·20 claims
- 0584US12158434B2Broadband wafer defect detectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 3, 2024·0 cites·20 claims
- 0684US11527382B2Ion implantation gas supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 13, 2022·1 cites·20 claims
- 0783US9218938B2Beam monitoring device, method, and systemTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Dec 22, 2015·5 cites·20 claims
- 0881US11908700B2Method for manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 20, 2024·0 cites·20 claims
- 0981US8058134B2Junction profile engineering using staged thermal annealingWANG LI-TING·Filed 2009·Granted Nov 15, 2011·8 cites·26 claims
- 1078US10269530B1Ion beam source for semiconductor ion implantationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 23, 2019·2 cites·20 claims
- 1178US9892954B2Wafer processing system using multi-zone chuckTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Feb 13, 2018·3 cites·20 claims
- 1277US7385208B2Systems and methods for implant dosage controlTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Jun 10, 2008·9 cites·20 claims
- 1376US11961707B2Ion implantation gas supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 16, 2024·0 cites·20 claims
- 1476US9239192B2Substrate rapid thermal heating system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 19, 2016·3 cites·20 claims
- 1575US10784079B2Ion implantation system and source bushing thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 22, 2020·1 cites·20 claims
- 1675US10541164B23D IC bump height metrology APCTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jan 21, 2020·1 cites·20 claims
- 1775US9006676B2Apparatus for monitoring ion implantationTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Apr 14, 2015·2 cites·20 claims
- 1873US11482422B2Method for manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 25, 2022·0 cites·20 claims
- 1973US11081315B2Ion impantation gas supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 3, 2021·1 cites·18 claims
- 2070US11075097B23D IC bump height metrology APCTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 27, 2021·0 cites·20 claims
- 2169US8039375B2Shallow junction formation and high dopant activation rate of MOS devicesTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Oct 18, 2011·2 cites·15 claims
- 2267US11282673B2Ion implantation system and source bushing thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 22, 2022·0 cites·20 claims
- 2363US10763117B2Semiconductor manufacturing apparatus and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 1, 2020·0 cites·20 claims
- 2463US9929045B2Defect inspection and repairing method and associated system and non-transitory computer readable mediumTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Mar 27, 2018·1 cites·20 claims
- 2561US10181415B23D IC bump height metrology APCTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 15, 2019·0 cites·20 claims
- 2661US8241924B2Method and system for controlling an implantation processCHENG NAI-HAN·Filed 2009·Granted Aug 14, 2012·1 cites·13 claims
- 2759US9892931B2Semiconductor manufacturing apparatus and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Feb 13, 2018·0 cites·20 claims
- 2856US2025237944A1Anti-slip compositions and components for semiconductor wafer handling systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2956US2024153787A1Control of environment within processing modulesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 3055US9449889B2Method for monitoring ion implantationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 20, 2016·0 cites·20 claims
- 3154US9865429B2Ion implantation with charge and direction controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 9, 2018·0 cites·20 claims
- 3252US8581204B2Apparatus for monitoring ion implantationCHANG CHUN-LIN·Filed 2011·Granted Nov 12, 2013·0 cites·20 claims
- 3352US8212253B2Shallow junction formation and high dopant activation rate of MOS devicesNIEH CHUN-FENG·Filed 2011·Granted Jul 3, 2012·0 cites·20 claims
- 3450US9805913B2Ion beam dimension control for ion implantation process and apparatus, and advanced process controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 31, 2017·0 cites·19 claims
- 3549US9070534B2Ion beam dimension control for ion implantation process and apparatus, and advanced process controlHWANG CHIH-HONG·Filed 2012·Granted Jun 30, 2015·0 cites·19 claims
- 3648US9315892B2Method and apparatus for controlling beam angle during ion implantation of a semiconductor wafer based upon pressureTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Apr 19, 2016·0 cites·20 claims
- 3747US8766207B2Beam monitoring device, method, and systemHWANG CHIH-HONG·Filed 2011·Granted Jul 1, 2014·0 cites·20 claims
- 3846US8592785B2Multi-ion beam implantation apparatus and methodCHENG NAI-HAN·Filed 2011·Granted Nov 26, 2013·0 cites·20 claims
- 3944US9031684B2Multi-factor advanced process control method and system for integrated circuit fabricationCHENG NAI-HAN·Filed 2011·Granted May 12, 2015·0 cites·16 claims
- 4043US8922122B2Ion implantation with charge and direction controlHWANG CHIH-HONG·Filed 2011·Granted Dec 30, 2014·0 cites·19 claims
- 4142US9048069B2Dosage accuracy monitoring systems of implantersCHEN JUAN-LIN·Filed 2007·Granted Jun 2, 2015·0 cites·28 claims
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