Inventor · disambiguated record
Yoshiyasu Kato
Also filed as: KATO YOSHIYASU
6 granted patents·1 pending application·13 citations·filing 2005–2021
73Inventor score
Top patents by PatentIndex Score
7 records- 0180US7411384B2Wafer chuckTOKYO ELECTRON LTD·Filed 2007·Granted Aug 12, 2008·9 cites·10 claims
- 0267US9638719B2Probe device having cleaning mechanism for cleaning connection conductorTOKYO ELECTRON LTD·Filed 2014·Granted May 2, 2017·2 cites·4 claims
- 0366US9759762B2Probe deviceTOKYO ELECTRON LTD·Filed 2014·Granted Sep 12, 2017·2 cites·14 claims
- 0457US11776829B2Dummy waferTOKYO ELECTRON LTD·Filed 2021·Granted Oct 3, 2023·0 cites·8 claims
- 0545US2022015193A1Method for controlling temperature of substrate support and inspection apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0643US9261553B2Probe apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Feb 16, 2016·0 cites·14 claims
- 0730US8678739B2Carrier supporting apparatusOGASAWARA IKUO·Filed 2005·Granted Mar 25, 2014·0 cites·5 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →