Inventor · disambiguated record
Eric Lavallee
Also filed as: LAVALLEE ERIC
6 granted patents·1 pending application·88 citations·filing 1997–2005
82Inventor score
Top patents by PatentIndex Score
7 records- 0180US6261938B1Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithographyQUANTISCRIPT INC·Filed 1998·Granted Jul 17, 2001·52 cites·38 claims
- 0265US6514877B1Method using sub-micron silicide structures formed by direct-write electron beam lithography for fabricating masks for extreme ultra-violet and deep ultra-violet lithographyUNIV SHERBROOKE·Filed 2000·Granted Feb 4, 2003·9 cites·3 claims
- 0358US6897140B2Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithographyQUANTISCRIPT INC·Filed 2001·Granted May 24, 2005·8 cites·22 claims
- 0452US5918143AFabrication of sub-micron silicide structures on silicon using resistless electron beam lithographyUNIV SHERBROOKE·Filed 1997·Granted Jun 29, 1999·15 cites·21 claims
- 0547US6855646B2Plasma polymerized electron beam resistQUANTISCRIPT INC·Filed 2002·Granted Feb 15, 2005·4 cites·29 claims
- 0637US2007065756A1High sensitivity electron beam resist processingQUANTISCRIPT INC UNIVERSITE DE·Filed 2005·Application pending·0 cites
- 0729US6777167B2Method of producing an etch-resistant polymer structure using electron beam lithographyFiled 2002·Granted Aug 17, 2004·0 cites·9 claims
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