Inventor · disambiguated record
Hsun-Chuan Shih
Also filed as: SHIH HSUN-CHUAN
7 granted patents·5 citations·filing 2013–2018
74Inventor score
Top patents by PatentIndex Score
7 records- 0181US9274417B2Method for lithography patterningTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 1, 2016·3 cites·20 claims
- 0278US10061193B2Focused radiation beam induced depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 28, 2018·2 cites·20 claims
- 0356US9395632B2Efficient solution for removing EUV native defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 19, 2016·0 cites·20 claims
- 0454US9810978B2Method for lithography patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Nov 7, 2017·0 cites·20 claims
- 0553US9298085B2Method for repairing a maskTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 29, 2016·0 cites·20 claims
- 0652US9759998B2Efficient solution for removing EUV native defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Sep 12, 2017·0 cites·20 claims
- 0749US9915866B2Focused radiation beam induced depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 13, 2018·0 cites·20 claims
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