Inventor · disambiguated record
Shiliang Lu
Also filed as: LU SHILIANG
5 granted patents·35 citations·filing 2003–2018
78Inventor score
Top patents by PatentIndex Score
5 records- 0168US7287434B2System and method for measuring flowCELERITY INC·Filed 2006·Granted Oct 30, 2007·7 cites·35 claims
- 0264US7363182B2System and method for mass flow detection device calibrationCELERITY INC·Filed 2005·Granted Apr 22, 2008·5 cites·10 claims
- 0363US7243035B2System and method for mass flow detection device calibrationCELERITY INC·Filed 2003·Granted Jul 10, 2007·9 cites·10 claims
- 0463US7150201B2System and method for measuring flowCELERITY INC·Filed 2004·Granted Dec 19, 2006·14 cites·35 claims
- 0544US11469121B2Spin coating device and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Oct 11, 2022·0 cites·9 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →