Inventor · disambiguated record
Koichi Tsukihara
Also filed as: TSUKIHARA KOICHI
11 granted patents·7 pending applications·76 citations·filing 2002–2017
88Inventor score
Top patents by PatentIndex Score
18 records- 0184US6780692B2Laser annealing apparatus and method of fabricating thin film transistorSONY CORP·Filed 2002·Granted Aug 24, 2004·30 cites·6 claims
- 0278US7820531B2Method of manufacturing semiconductor device, method of manufacturing display apparatus, apparatus of manufacturing semiconductor device, and display apparatusSONY CORP·Filed 2008·Granted Oct 26, 2010·6 cites·9 claims
- 0374US8226256B2Display unitURABE TETSUO·Filed 2007·Granted Jul 24, 2012·5 cites·6 claims
- 0474US7109435B2Beam irradiator and laser anneal deviceSONY CORP·Filed 2002·Granted Sep 19, 2006·18 cites·45 claims
- 0572US8193008B2Method of forming semiconductor thin film and semiconductor thin film inspection apparatusUMEZU NOBUHIKO·Filed 2009·Granted Jun 5, 2012·4 cites·20 claims
- 0671US8168518B2Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display deviceUMEZU NOBUHIKO·Filed 2008·Granted May 1, 2012·3 cites·13 claims
- 0761US7154673B2Light irradiatorSONY CORP·Filed 2003·Granted Dec 26, 2006·8 cites·7 claims
- 0857US8451536B2Irradiation apparatus and manufacturing method for semiconductor deviceTSUKIHARA KOICHI·Filed 2010·Granted May 28, 2013·1 cites·1 claims
- 0956US8592713B2Irradiating apparatus, semiconductor device manufacturing apparatus, semiconductor device manufacturing method, and display device manufacturing methodTSUKIHARA KOICHI·Filed 2008·Granted Nov 26, 2013·1 cites·9 claims
- 1054US2009233456A1Irradiation optical system, irradiation apparatus and fabrication method for semiconductor deviceSONY CORP·Filed 2009·Application pending·0 cites
- 1151US11112345B2Microparticle measurement device and cleaning method for microparticle measurement deviceSONY CORP·Filed 2017·Granted Sep 7, 2021·0 cites·11 claims
- 1251US8518756B2Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display deviceUMEZU NOBUHIKO·Filed 2012·Granted Aug 27, 2013·0 cites·13 claims
- 1351US2012262943A1Display unitURABE TETSUO·Filed 2012·Application pending·0 cites
- 1446US2012038983A1Irradiation optical system, irradiation apparatus and fabrication method for semiconductor deviceTSUKIHARA KOICHI·Filed 2011·Application pending·0 cites
- 1545US2012231559A1Method of forming semiconductor thin film and semiconductor thin film inspection apparatusUMEZU NOBUHIKO·Filed 2012·Application pending·0 cites
- 1644US2014370586A1Microchip and microchip-type fine-particle measuring deviceSONY CORP·Filed 2012·Application pending·0 cites
- 1738US2004232126A1Laser annealing apparatus and method of fabricating thin film transistorFiled 2004·Application pending·0 cites
- 1837US2005269298A1Light irradiator and light irradiating methodHOTTA SHIN·Filed 2003·Application pending·0 cites
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