Inventor · disambiguated record
Thomas Parrill
Also filed as: PARRILL THOMAS · PARRILL THOMAS M
7 granted patents·1 pending application·86 citations·filing 1998–2010
85Inventor score
Files withTWIN CREEKS TECHNOLOGIES INC3TEXAS INSTRUMENTS INC2AXCELIS TECH INC1MKS INSTR INC1PARRILL THOMAS1
Top patents by PatentIndex Score
8 records- 0190US7687786B2Ion implanter for noncircular wafersTWIN CREEKS TECHNOLOGIES INC·Filed 2008·Granted Mar 30, 2010·13 cites·12 claims
- 0289US8242468B2Ion implanter for photovoltaic cell fabricationPARRILL THOMAS·Filed 2010·Granted Aug 14, 2012·16 cites·15 claims
- 0383US7750322B2Ion implanter for photovoltaic cell fabricationTWIN CREEKS TECHNOLOGIES INC·Filed 2009·Granted Jul 6, 2010·6 cites·29 claims
- 0482US6828572B2Ion beam incident angle detector for ion implant systemsAXCELIS TECH INC·Filed 2003·Granted Dec 7, 2004·31 cites·42 claims
- 0551US2008083609A1Oxygen conditioning of plasma vesselsMKS INSTR INC·Filed 2007·Application pending·0 cites
- 0648US7897945B2Hydrogen ion implanter using a broad beam sourceTWIN CREEKS TECHNOLOGIES INC·Filed 2008·Granted Mar 1, 2011·0 cites·15 claims
- 0741US6287983B2Selective nitride etching with silicate ion pre-loadingTEXAS INSTRUMENTS INC·Filed 1998·Granted Sep 11, 2001·10 cites·2 claims
- 0840US6228741B1Method for trench isolation of semiconductor devicesTEXAS INSTRUMENTS INC·Filed 1999·Granted May 8, 2001·10 cites·18 claims
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