Inventor · disambiguated record
Chi-Wei Chung
Also filed as: CHUNG CHI-WEI
2 granted patents·2 pending applications·26 citations·filing 2002–2007
61Inventor score
Top patents by PatentIndex Score
4 records- 0175US6946397B2Chemical mechanical polishing process with reduced defects in a copper processTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Sep 20, 2005·18 cites·24 claims
- 0260US6686284B2Chemical mechanical polisher equipped with chilled retaining ring and method of usingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 3, 2004·8 cites·17 claims
- 0345US2007281853A1Manufacturing method of fuel cell with integration of catalytic layer and micro sensorsLEE CHI-YUAN·Filed 2007·Application pending·0 cites
- 0436US2004137740A1Method to reduce dishing, erosion and low-k dielectric peeling for copper in low-k dielectric CMP processTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
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