Inventor · disambiguated record
Hyo Chang Lee
Also filed as: LEE HYO CHANG
3 granted patents·0 citations·filing 2018–2021
40Inventor score
Files withKOREA RES INST STANDARDS & SCI3
Top patents by PatentIndex Score
3 records- 0156US11735397B2Device for measuring plasma ion density and apparatus for diagnosing plasma using the sameKOREA RES INST STANDARDS & SCI·Filed 2021·Granted Aug 22, 2023·0 cites·8 claims
- 0239US11867643B2Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buriedKOREA RES INST STANDARDS & SCI·Filed 2019·Granted Jan 9, 2024·0 cites·20 claims
- 0339US11211231B2Plasma generation apparatusKOREA RES INST STANDARDS & SCI·Filed 2018·Granted Dec 28, 2021·0 cites·15 claims
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