Inventor · disambiguated record

Melisa Luca

Also filed as: LUCA MELISA

1 granted patent·1 citations·filing 2017–2017

16Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0169US11048174B2Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer programASML NETHERLANDS BV·Filed 2017·Granted Jun 29, 2021·1 cites·21 claims

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