Inventor · disambiguated record
Liesbeth Reijnen
Also filed as: REIJNEN LIESBETH
1 granted patent·1 pending application·1 citations·filing 2017–2017
16Inventor score
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0169US11048174B2Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer programASML NETHERLANDS BV·Filed 2017·Granted Jun 29, 2021·1 cites·21 claims
- 0234US2019214318A1Method and apparatus to monitor a process apparatusASML NETHERLANDS BV·Filed 2017·Application pending·0 cites
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