Inventor · disambiguated record
Taku Morisawa
Also filed as: MORISAWA TAKU
5 granted patents·1 pending application·9 citations·filing 2010–2016
69Inventor score
Top patents by PatentIndex Score
6 records- 0185US8916331B2Resist composition and patterning processHASEGAWA KOJI·Filed 2011·Granted Dec 23, 2014·5 cites·16 claims
- 0273US8778592B2Positive resist composition and patterning processHATAKEYAMA JUN·Filed 2012·Granted Jul 15, 2014·3 cites·6 claims
- 0365US9201301B2Method for producing resist compositionSHINETSU CHEMICAL CO·Filed 2014·Granted Dec 1, 2015·1 cites·4 claims
- 0441US9502247B2Method for forming coating film for lithographySHINETSU CHEMICAL CO·Filed 2016·Granted Nov 22, 2016·0 cites·16 claims
- 0538US2011305979A1Resist top coat composition and patterning processHARADA YUJI·Filed 2011·Application pending·0 cites
- 0637US8945809B2Fluorinated monomer, fluorinated polymer, resist composition, and patterning processHASEGAWA KOJI·Filed 2010·Granted Feb 3, 2015·0 cites·15 claims
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