Inventor · disambiguated record
Kun-Ku Hung
Also filed as: HUNG KUN-KU
2 granted patents·1 pending application·22 citations·filing 2002–2009
59Inventor score
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3 records- 0184US8277286B2Slurry dispenser for chemical mechanical polishing (CMP) apparatus and methodHUNG KUN-KU·Filed 2009·Granted Oct 2, 2012·17 cites·19 claims
- 0248US6638868B1Method for preventing or reducing anodic Cu corrosion during CMPTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Oct 28, 2003·5 cites·14 claims
- 0346US2010291840A1System and method for conditioning chemical mechanical polishing apparatus using multiple conditioning disksTAIWAN SEMICONDUCTOR MFG·Filed 2009·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →