Inventor · disambiguated record
Toshihiko Onozuka
Also filed as: ONOZUKA TOSHIHIKO
7 granted patents·2 pending applications·73 citations·filing 1996–2013
84Inventor score
Top patents by PatentIndex Score
9 records- 0193US7501347B2Semiconductor device and manufacturing method of the sameHITACHI LTD·Filed 2006·Granted Mar 10, 2009·23 cites·11 claims
- 0290US8247902B2Semiconductor device and manufacturing method of the sameNOGUCHI JUNJI·Filed 2011·Granted Aug 21, 2012·10 cites·12 claims
- 0386US8586447B2Semiconductor device and manufacturing method of the sameNOGUCHI JUNJI·Filed 2012·Granted Nov 19, 2013·6 cites·2 claims
- 0461US5725971AMethod of manufacturing phase shift masks and a method of manufacturing semiconductor integrated circuit devicesHITACHI LTD·Filed 1996·Granted Mar 10, 1998·22 cites·19 claims
- 0555US7911055B2Semiconductor device and manufacturing method of the sameHITACHI LTD·Filed 2009·Granted Mar 22, 2011·0 cites·9 claims
- 0642US6040110AProcess and apparatus for the removal of resistNITTO DENKO CORP·Filed 1998·Granted Mar 21, 2000·12 cites·12 claims
- 0737US2013244146A1Method of manufacturing a semiconductor deviceHITACHI LTD·Filed 2013·Application pending·0 cites
- 0835US2014092384A1Diffraction grating manufacturing method, spectrophotometer, and semiconductor device manufacturing methodEBATA YOSHISADA·Filed 2012·Application pending·0 cites
- 0933US9390934B2Phase shift mask, method of forming asymmetric pattern, method of manufacturing diffraction grating, and method of manufacturing semiconductor deviceKAKUTA KAZUYUKI·Filed 2012·Granted Jul 12, 2016·0 cites·6 claims
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