Inventor · disambiguated record
Leslie M. Charns
Also filed as: CHARNS LESLIE · CHARNS LESLIE M
8 granted patents·43 citations·filing 2011–2017
84Inventor score
Top patents by PatentIndex Score
8 records- 0191US9649742B2Polishing pad having polishing surface with continuous protrusionsNEXPLANAR CORP·Filed 2013·Granted May 16, 2017·13 cites·22 claims
- 0291US8513127B2Chemical mechanical planarization processes for fabrication of FinFET devicesCHANG JOSEPHINE B·Filed 2011·Granted Aug 20, 2013·10 cites·20 claims
- 0389US8524606B2Chemical mechanical planarization with overburden maskCHARNS LESLIE·Filed 2011·Granted Sep 3, 2013·11 cites·25 claims
- 0482US10160092B2Polishing pad having polishing surface with continuous protrusions having tapered sidewallsNEXPLANAR CORP·Filed 2013·Granted Dec 25, 2018·5 cites·37 claims
- 0572US8497210B2Shallow trench isolation chemical mechanical planarizationCHARNS LESLIE·Filed 2011·Granted Jul 30, 2013·2 cites·25 claims
- 0669US9597769B2Polishing pad with polishing surface layer having an aperture or opening above a transparent foundation layerLEFEVRE PAUL ANDRE·Filed 2012·Granted Mar 21, 2017·2 cites·59 claims
- 0752US10293459B2Polishing pad having polishing surface with continuous protrusionsNEXPLANAR CORP·Filed 2017·Granted May 21, 2019·0 cites·23 claims
- 0852US8507383B2Fabrication of replacement metal gate devicesANDO TAKASHI·Filed 2011·Granted Aug 13, 2013·0 cites·24 claims
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