Inventor · disambiguated record
Kanji Tsujii
Also filed as: TSUJII KANJI
8 granted patents·248 citations·filing 1984–1988
89Inventor score
Files withHITACHI LTD8
Top patents by PatentIndex Score
8 records- 0188US4716852AApparatus for thin film formation using photo-induced chemical reactionHITACHI LTD·Filed 1986·Granted Jan 5, 1988·61 cites·16 claims
- 0280US4615756ADry etching apparatusHITACHI LTD·Filed 1985·Granted Oct 7, 1986·54 cites·22 claims
- 0379US5140272AMethod of semiconductor surface measurment and an apparatus for realizing the sameHITACHI LTD·Filed 1988·Granted Aug 18, 1992·34 cites·8 claims
- 0479US4678536AMethod of photochemical surface treatmentHITACHI LTD·Filed 1985·Granted Jul 7, 1987·37 cites·4 claims
- 0572US4643799AMethod of dry etchingHITACHI LTD·Filed 1985·Granted Feb 17, 1987·38 cites·10 claims
- 0659US4653908AGrazing incidence reflection spectrometerHITACHI LTD·Filed 1984·Granted Mar 31, 1987·16 cites·4 claims
- 0741US4887037AElectron spin resonance spectrometerHITACHI LTD·Filed 1988·Granted Dec 12, 1989·7 cites·19 claims
- 0829US4936252AEquipment for manufacturing semiconductor devicesHITACHI LTD·Filed 1988·Granted Jun 26, 1990·1 cites·4 claims
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