Inventor · disambiguated record

Fengzhao Dai

Also filed as: DAI FENGZHAO

1 granted patent·3 citations·filing 2015–2015

20Inventor score

Technology areasG03F

Files withSHANGHAI INST OPTICS & FINE MECH CAS1

Top patents by PatentIndex Score

1 record

0176US9766154B2Multi field point aberration parallel metrology device and method for lithographic projection lensSHANGHAI INST OPTICS & FINE MECH CAS·Filed 2015·Granted Sep 19, 2017·3 cites·4 claims

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