Inventor · disambiguated record
Naoki Toyomura
Also filed as: TOYOMURA NAOKI
14 granted patents·4 pending applications·35 citations·filing 2014–2024
87Inventor score
Files withEBARA CORP18
Top patents by PatentIndex Score
18 records- 0193US9700988B2Substrate processing apparatusEBARA CORP·Filed 2015·Granted Jul 11, 2017·8 cites·30 claims
- 0287US10201888B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 12, 2019·3 cites·20 claims
- 0383US12350787B2Substrate processing apparatusEBARA CORP·Filed 2023·Granted Jul 8, 2025·0 cites·9 claims
- 0475US9673067B2Substrate processing apparatus and processed substrate manufacturing methodEBARA CORP·Filed 2014·Granted Jun 6, 2017·3 cites·10 claims
- 0575US2023352326A1Substrate processing apparatus and processing methodEBARA CORP·Filed 2023·Application pending·0 cites
- 0674USD790489SVacuum contact padEBARA CORP·Filed 2016·Granted Jun 27, 2017·16 cites·1 claims
- 0764US2021013071A1Substrate processing apparatus and processing methodEBARA CORP·Filed 2020·Application pending·0 cites
- 0863US11731240B2Substrate processing apparatusEBARA CORP·Filed 2018·Granted Aug 22, 2023·0 cites·6 claims
- 0961US2024416390A1Substrate processing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 1055US11846536B2Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assemblyEBARA CORP·Filed 2019·Granted Dec 19, 2023·0 cites·10 claims
- 1150US2016099156A1Substrate processing apparatus and processing methodEBARA CORP·Filed 2015·Application pending·0 cites
- 1249USD795315SDresser diskEBARA CORP·Filed 2015·Granted Aug 22, 2017·5 cites·1 claims
- 1346US10438820B2Substrate processing apparatus, discharge method, and programEBARA CORP·Filed 2017·Granted Oct 8, 2019·0 cites·9 claims
- 1444US11103972B2Buff processing device and substrate processing deviceEBARA CORP·Filed 2016·Granted Aug 31, 2021·0 cites·12 claims
- 1542US10898987B2Table for holding workpiece and processing apparatus with the tableEBARA CORP·Filed 2016·Granted Jan 26, 2021·0 cites·21 claims
- 1637US11195736B2Substrate processing apparatus, method of detaching substrate from vacuum suction table of substrate processing apparatus, and method of placing substrate onto vacuum suction table of substrate processing apparatusEBARA CORP·Filed 2016·Granted Dec 7, 2021·0 cites·7 claims
- 1737US10847407B2Substrate holding apparatusEBARA CORP·Filed 2016·Granted Nov 24, 2020·0 cites·8 claims
- 1837US10121692B2Substrate holding apparatusEBARA CORP·Filed 2015·Granted Nov 6, 2018·0 cites·24 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →