Inventor · disambiguated record

Darren Southworth

Also filed as: SOUTHWORTH DARREN · SOUTHWORTH DARREN R · SOUTHWORTH DARREN ROBERT

3 granted patents·2 citations·filing 2011–2017

50Inventor score

Technology areasH10P G01N

Files withSUSS MICROTEC LITHOGRAPHY GMBH2 PARPIA JEEVAK M1

Top patents by PatentIndex Score

3 records

0170US9799554B2Method for coating a substrateSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted Oct 24, 2017·2 cites·19 claims
0241US9562888B2Stress-based sensor, method, and applicationsPARPIA JEEVAK M·Filed 2011·Granted Feb 7, 2017·0 cites·10 claims
0332US10596592B2Method for coating a substrate and also a coating systemSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2017·Granted Mar 24, 2020·0 cites·12 claims

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