Inventor · disambiguated record

Daishi Tanak

Also filed as: TANAK DAISHI

1 granted patent·32 citations·filing 2012–2012

49Inventor score

Technology areasG03F

Files withPOON ALEX1

Top patents by PatentIndex Score

1 record

0194US8400610B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machinePOON ALEX·Filed 2012·Granted Mar 19, 2013·32 cites·16 claims

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