Inventor · disambiguated record
Susrut Kesari
Also filed as: KESARI SUSRUT
5 granted patents·117 citations·filing 2001–2002
82Inventor score
Files with3M INNOVATIVE PROPERTIES CO5
Top patents by PatentIndex Score
5 records- 0193US6394107B1Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components3M INNOVATIVE PROPERTIES CO·Filed 2001·Granted May 28, 2002·42 cites·17 claims
- 0284US6858124B2Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor3M INNOVATIVE PROPERTIES CO·Filed 2002·Granted Feb 22, 2005·34 cites·27 claims
- 0381US6884338B2Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor3M INNOVATIVE PROPERTIES CO·Filed 2002·Granted Apr 26, 2005·26 cites·58 claims
- 0471US7147767B2Plating solutions for electrochemical or chemical deposition of copper interconnects and methods therefor3M INNOVATIVE PROPERTIES CO·Filed 2002·Granted Dec 12, 2006·7 cites·25 claims
- 0561US6540930B2Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases3M INNOVATIVE PROPERTIES CO·Filed 2001·Granted Apr 1, 2003·8 cites·15 claims
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