Inventor · disambiguated record
Sheng-Hsun Lu
Also filed as: LU SHENG-HSUN
3 granted patents·1 citations·filing 2019–2023
53Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG CO LTD3
Top patents by PatentIndex Score
3 records- 0184US11814731B2Semiconductor tool having controllable ambient environment processing zonesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 14, 2023·1 cites·20 claims
- 0278US12398468B2Semiconductor tool having controllable ambient environment processing zonesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 26, 2025·0 cites·20 claims
- 0359US11047050B2Semiconductor tool having controllable ambient environment processing zonesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 29, 2021·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →