Inventor · disambiguated record
Elyakim Kassel
Also filed as: KASSEL ELYAKIM
4 granted patents·110 citations·filing 2003–2018
77Inventor score
Top patents by PatentIndex Score
4 records- 0195US7671990B1Cross hatched metrology marks and associated method of useKLA TENCOR TECH CORP·Filed 2007·Granted Mar 2, 2010·40 cites·8 claims
- 0292US7804994B2Overlay metrology and control methodKLA TENCOR TECH CORP·Filed 2003·Granted Sep 28, 2010·54 cites·16 claims
- 0386US7925486B2Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layoutKLA TENCOR TECH CORP·Filed 2007·Granted Apr 12, 2011·16 cites·18 claims
- 0435US10600635B2Method and apparatus for a semiconductor-on-higher thermal conductive multi-layer composite waferKASSEL ELYAKIM·Filed 2018·Granted Mar 24, 2020·0 cites·7 claims
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