Inventor · disambiguated record

Robert Hardister

Also filed as: HARDISTER ROBERT

1 granted patent·16 citations·filing 2007–2007

37Inventor score

Technology areasG03F

Files withKLA TENCOR TECH CORP1

Top patents by PatentIndex Score

1 record

0186US7925486B2Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layoutKLA TENCOR TECH CORP·Filed 2007·Granted Apr 12, 2011·16 cites·18 claims

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