Inventor · disambiguated record
Masanori Tateyama
Also filed as: TATEYAMA MASANORI
13 granted patents·1 pending application·900 citations·filing 1989–2011
94Inventor score
Files withTOKYO ELECTRON LTD13
Top patents by PatentIndex Score
14 records- 0195US5565034AApparatus for processing substrates having a film formed on a surface of the substrateTOKYO ELECTRON LTD·Filed 1994·Granted Oct 15, 1996·216 cites·38 claims
- 0295US5061144AResist process apparatusTOKYO ELECTRON LTD·Filed 1989·Granted Oct 29, 1991·183 cites·10 claims
- 0391US6054181AMethod of substrate processing to form a film on multiple target objectsTOKYO ELECTRON LTD·Filed 1996·Granted Apr 25, 2000·106 cites·18 claims
- 0491US5664254ASubstrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 1996·Granted Sep 2, 1997·129 cites·16 claims
- 0589US6526329B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Feb 25, 2003·64 cites·12 claims
- 0689US5725664ASemiconductor wafer processing apparatus including localized humidification between coating and heat treatment sectionsTOKYO ELECTRON LTD·Filed 1996·Granted Mar 10, 1998·87 cites·23 claims
- 0788US6507770B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Jan 14, 2003·47 cites·16 claims
- 0879US6834210B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Dec 21, 2004·23 cites·12 claims
- 0976US6457882B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Oct 1, 2002·19 cites·39 claims
- 1059USRE37470ESubstrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 1999·Granted Dec 18, 2001·22 cites·16 claims
- 1155US8015940B2Coater/developer, method of coating and developing resist film, and computer readable storing mediumTOKYO ELECTRON LTD·Filed 2008·Granted Sep 13, 2011·0 cites·3 claims
- 1254US6394670B2Parts maintenance managing systemTOKYO ELECTRON LTD·Filed 2001·Granted May 28, 2002·4 cites·11 claims
- 1348US8372480B2Coater/developer, method of coating and developing resist film, and computer readable storing mediumTOKYO ELECTRON LTD·Filed 2011·Granted Feb 12, 2013·0 cites·3 claims
- 1434US2001016225A1Coating film forming apparatus and coating film forming methodFiled 2001·Application pending·0 cites
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