Inventor · disambiguated record
Chander Radhakrishnan
Also filed as: RADHAKRISHNAN CHANDER
3 granted patents·2 citations·filing 2014–2019
51Inventor score
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0171US9824865B2Waferless clean in dielectric etch processLAM RES CORP·Filed 2014·Granted Nov 21, 2017·2 cites·18 claims
- 0254US10147587B2Waferless clean in dielectric etch processLAM RES CORP·Filed 2017·Granted Dec 4, 2018·0 cites·20 claims
- 0337US12444588B2Method and apparatus for processing wafersLAM RES CORP·Filed 2019·Granted Oct 14, 2025·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →