Inventor · disambiguated record

Chu-Yeu Peter Yang

Also filed as: YANG CHU-YEU PETER

1 granted patent·31 citations·filing 2005–2005

45Inventor score

Technology areasG03F

Files withSANDIA CORP1

Top patents by PatentIndex Score

1 record

0191US7608367B1Vitreous carbon mask substrate for X-ray lithographySANDIA CORP·Filed 2005·Granted Oct 27, 2009·31 cites·25 claims

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Chu-Yeu Peter Yang — Patent Inventor | PatentIndex