Inventor · disambiguated record
Mark Schattenburg
Also filed as: SCHATTENBURG MARK · SCHATTENBURG MARK L
13 granted patents·506 citations·filing 1987–2020
92Inventor score
Top patents by PatentIndex Score
13 records- 0197US6882477B1Method and system for interference lithography utilizing phase-locked scanning beamsMASSACHUSETTS INST TECHNOLOGY·Filed 2000·Granted Apr 19, 2005·178 cites·31 claims
- 0296US4890309ALithography mask with a π-phase shifting attenuatorMASSACHUSETTS INST TECHNOLOGY·Filed 1987·Granted Dec 26, 1989·133 cites·18 claims
- 0392US5142385AHolographic lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 1991·Granted Aug 25, 1992·101 cites·12 claims
- 0481US5136169AEnergy beam locatingMASSACHUSETTS INST TECHNOLOGY·Filed 1991·Granted Aug 4, 1992·41 cites·50 claims
- 0580US10108096B2Apparatus and method for using scanning light beam for film or surface modificationLithoptek LLC·Filed 2016·Granted Oct 23, 2018·2 cites·36 claims
- 0679US8025832B2Method for shaping sheet thermoplastic and the likeMASSACHUSETTS INST TECHNOLOGY·Filed 2007·Granted Sep 27, 2011·4 cites·16 claims
- 0775US10503083B2Apparatus and method for using scanning light beam for film or surface modificationLithoptek LLC·Filed 2018·Granted Dec 10, 2019·1 cites·40 claims
- 0874US9612534B2Exposure dose homogenization through rotation, translation, and variable processing conditionsTOKYO ELECTRON LTD·Filed 2015·Granted Apr 4, 2017·1 cites·20 claims
- 0968US5809103AX-ray lithography maskingMASSACHUSETTS INST TECHNOLOGY·Filed 1996·Granted Sep 15, 1998·28 cites·22 claims
- 1065US6822248B2Spatial phase locking with shaped electron beam lithographyIBM·Filed 2001·Granted Nov 23, 2004·13 cites·20 claims
- 1158US7492989B2Hybrid transmission-reflection gratingMASSACHUSETTS INST TECHNOLOGY·Filed 2006·Granted Feb 17, 2009·4 cites·4 claims
- 1247US10145672B2Detection of position, orientation and scale of work pieces using retroreflective surfacesLithoptek LLC·Filed 2017·Granted Dec 4, 2018·0 cites·34 claims
- 1345US11879170B2Stress patterning systems and methods for manufacturing free-form deformations in thin substratesMASSACHUSETTS INST TECHNOLOGY·Filed 2020·Granted Jan 23, 2024·0 cites·16 claims
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