Inventor · disambiguated record
Michie Sunayama
Also filed as: SUNAYAMA MICHIE
10 granted patents·54 citations·filing 2008–2012
86Inventor score
Top patents by PatentIndex Score
10 records- 0192US8168532B2Method of manufacturing a multilayer interconnection structure in a semiconductor deviceHANEDA MASAKI·Filed 2008·Granted May 1, 2012·21 cites·13 claims
- 0291US8003527B2Manufacturing method of semiconductor deviceFUJITSU SEMICONDUCTOR LTD·Filed 2010·Granted Aug 23, 2011·14 cites·15 claims
- 0382US7955970B2Semiconductor device manufacturing methodFUJITSU SEMICONDUCTOR LTD·Filed 2009·Granted Jun 7, 2011·8 cites·7 claims
- 0475US8003518B2Semiconductor device fabrication methodFUJITSU SEMICONDUCTOR LTD·Filed 2009·Granted Aug 23, 2011·6 cites·18 claims
- 0573US7816279B2Semiconductor device and method for manufacturing the sameFUJITSU SEMICONDUCTOR LTD·Filed 2009·Granted Oct 19, 2010·3 cites·7 claims
- 0661US8067836B2Semiconductor device with reduced increase in copper film resistanceHANEDA MASAKI·Filed 2009·Granted Nov 29, 2011·1 cites·6 claims
- 0757US8119524B2Method of manufacturing semiconductor deviceSUNAYAMA MICHIE·Filed 2010·Granted Feb 21, 2012·1 cites·12 claims
- 0849US9559058B2Semiconductor device and method for manufacturing the sameHANEDA MASAKI·Filed 2012·Granted Jan 31, 2017·0 cites·8 claims
- 0949US7803642B2Evaluation method of semiconductor deviceFUJITSU SEMICONDUCTOR LTD·Filed 2009·Granted Sep 28, 2010·0 cites·17 claims
- 1045US8497208B2Semiconductor device and method for manufacturing the sameSUNAYAMA MICHIE·Filed 2010·Granted Jul 30, 2013·0 cites·11 claims
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