Inventor · disambiguated record
Takehito Seo
Also filed as: SEO TAKEHITO
2 granted patents·2 citations·filing 2008–2019
35Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0168US8227169B2Compound, acid generator, resist composition, and method of forming resist patternKAWAUE AKIYA·Filed 2008·Granted Jul 24, 2012·2 cites·9 claims
- 0240US11029600B2Resist composition and method of forming resist patternTOKYO OHKA KOGYO CO LTD·Filed 2019·Granted Jun 8, 2021·0 cites·8 claims
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