Inventor · disambiguated record
Shaun Smith
Also filed as: SMITH SHAUN · SMITH SHAUN T · SMITH SHAUN TYLER
6 granted patents·3 pending applications·27 citations·filing 2015–2022
80Inventor score
Top patents by PatentIndex Score
9 records- 0194US11531312B2Adaptive control for a power generatorMKS INSTR INC·Filed 2021·Granted Dec 20, 2022·5 cites·16 claims
- 0292US12283462B2Control of plasma formation by RF coupling structuresLAM RES CORP·Filed 2021·Granted Apr 22, 2025·2 cites·31 claims
- 0392US9736920B2Apparatus and method for plasma ignition with a self-resonating deviceMKS INSTR INC·Filed 2015·Granted Aug 15, 2017·12 cites·27 claims
- 0484US11042140B2Adaptive control for a power generatorMKS INSTR INC·Filed 2019·Granted Jun 22, 2021·3 cites·27 claims
- 0582US10553403B1Polygonal toroidal plasma sourceMKS INSTR INC·Filed 2019·Granted Feb 4, 2020·3 cites·26 claims
- 0676US10076020B2Apparatus and method for plasma ignition with a self-resonating deviceMKS INSTR INC·Filed 2017·Granted Sep 11, 2018·2 cites·29 claims
- 0753US2025132132A1Electrode-dielectric nozzle for plasma processingLAM RES CORP·Filed 2022·Application pending·0 cites
- 0850US2023207274A1Photoelectron assisted plasma ignitionLAM RES CORP·Filed 2021·Application pending·0 cites
- 0932US2016233055A1Apparatus and Method for Metastable Enhanced Plasma IgnitionMKS INSTR INC·Filed 2015·Application pending·0 cites
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