Inventor · disambiguated record
Sung Il Chung
Also filed as: CHUNG SUNG I · CHUNG SUNG IL
5 granted patents·31 citations·filing 1996–2010
75Inventor score
Top patents by PatentIndex Score
5 records- 0182US9190239B2Plasma immersion ion milling apparatus and methodCHUNG SUNG IL·Filed 2010·Granted Nov 17, 2015·11 cites·10 claims
- 0273US8354908B2Cylindrical magnetic levitation stageKOREA ELECTROTECH RES INST·Filed 2008·Granted Jan 15, 2013·5 cites·32 claims
- 0349US8964167B2Cylindrical magnetic levitation stage and lithographyJEON JEONG WOO·Filed 2010·Granted Feb 24, 2015·1 cites·10 claims
- 0437US8591711B2Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surfaceCHUNG SUNG IL·Filed 2008·Granted Nov 26, 2013·0 cites·18 claims
- 0531US5699928AEasy flip top tab lifterFiled 1996·Granted Dec 23, 1997·14 cites·8 claims
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