Inventor · disambiguated record
Hideki Takayanagi
Also filed as: TAKAYANAGI HIDEKI
9 granted patents·91 citations·filing 2001–2019
87Inventor score
Top patents by PatentIndex Score
9 records- 0192US6852019B2Substrate holding apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·49 cites·40 claims
- 0291US7083507B2Substrate holding apparatusEBARA CORP·Filed 2005·Granted Aug 1, 2006·14 cites·37 claims
- 0390US7491117B2Substrate holding apparatusEBARA CORP·Filed 2006·Granted Feb 17, 2009·11 cites·5 claims
- 0482US7850509B2Substrate holding apparatusEBARA CORP·Filed 2008·Granted Dec 14, 2010·5 cites·5 claims
- 0576US10611027B2Assembly apparatus and control method thereforSONY CORP·Filed 2016·Granted Apr 7, 2020·3 cites·10 claims
- 0673US11604150B2Device for measuring bump height, apparatus for processing substrate, method of measuring bump height, and storage mediumEBARA CORP·Filed 2019·Granted Mar 14, 2023·2 cites·25 claims
- 0768US11230789B2Method of removing liquid from seal of a substrate holderEBARA CORP·Filed 2019·Granted Jan 25, 2022·0 cites·8 claims
- 0860US7156725B2Substrate polishing machineEBARA CORP·Filed 2002·Granted Jan 2, 2007·7 cites·5 claims
- 0957US11535949B2Substrate holder and plating apparatusEBARA CORP·Filed 2019·Granted Dec 27, 2022·0 cites·18 claims
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