Inventor · disambiguated record
Makoto Fukushima
Also filed as: FUKUSHIMA MAKOTO
95 granted patents·16 pending applications·2,103 citations·filing 1992–2025
99Inventor score
Top patents by PatentIndex Score
111 records- 0199USD793976SSubstrate retaining ringEBARA CORP·Filed 2016·Granted Aug 8, 2017·434 cites·1 claims
- 0299USD634719SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 22, 2011·539 cites·1 claims
- 0399USD633452SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 1, 2011·342 cites·1 claims
- 0496US10442056B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2013·Granted Oct 15, 2019·16 cites·29 claims
- 0595US10040166B2Polishing apparatusEBARA CORP·Filed 2014·Granted Aug 7, 2018·11 cites·15 claims
- 0695US9403255B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Aug 2, 2016·14 cites·49 claims
- 0795US8932106B2Polishing apparatus having thermal energy measuring meansFUKUSHIMA MAKOTO·Filed 2011·Granted Jan 13, 2015·14 cites·9 claims
- 0895US8083571B2Polishing apparatusNABEYA OSAMU·Filed 2005·Granted Dec 27, 2011·22 cites·5 claims
- 0994US8859070B2Elastic membraneEBARA CORP·Filed 2012·Granted Oct 14, 2014·16 cites·25 claims
- 1093US10293455B2Polishing apparatusEBARA CORP·Filed 2016·Granted May 21, 2019·5 cites·18 claims
- 1193USD769200SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2013·Granted Oct 18, 2016·48 cites·1 claims
- 1292US11472001B2Elastic membrane and substrate holding apparatusEBARA CORP·Filed 2020·Granted Oct 18, 2022·2 cites·9 claims
- 1392US8485866B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2012·Granted Jul 16, 2013·8 cites·6 claims
- 1492US7357699B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2004·Granted Apr 15, 2008·49 cites·34 claims
- 1592US7311585B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 25, 2007·15 cites·12 claims
- 1692US6852019B2Substrate holding apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·49 cites·40 claims
- 1791US7083507B2Substrate holding apparatusEBARA CORP·Filed 2005·Granted Aug 1, 2006·14 cites·37 claims
- 1890US11548113B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2019·Granted Jan 10, 2023·2 cites·8 claims
- 1990US10391603B2Polishing apparatus, control method and recording mediumEBARA CORP·Filed 2016·Granted Aug 27, 2019·4 cites·19 claims
- 2090US7632173B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2007·Granted Dec 15, 2009·11 cites·37 claims
- 2190US7491117B2Substrate holding apparatusEBARA CORP·Filed 2006·Granted Feb 17, 2009·11 cites·5 claims
- 2289US11179823B2Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membraneEBARA CORP·Filed 2017·Granted Nov 23, 2021·3 cites·19 claims
- 2389US10702972B2Polishing apparatusEBARA CORP·Filed 2014·Granted Jul 7, 2020·7 cites·15 claims
- 2489USD839224SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2017·Granted Jan 29, 2019·28 cites·1 claims
- 2589US10092992B2Polishing apparatus, polishing head, and retainer ringEBARA CORP·Filed 2016·Granted Oct 9, 2018·3 cites·29 claims
- 2689US9662764B2Substrate holder, polishing apparatus, and polishing methodEBARA CORP·Filed 2013·Granted May 30, 2017·7 cites·18 claims
- 2789US8100743B2Polishing apparatusNABEYA OSAMU·Filed 2008·Granted Jan 24, 2012·14 cites·8 claims
- 2888US8070560B2Polishing apparatus and methodYASUDA HOZUMI·Filed 2008·Granted Dec 6, 2011·13 cites·7 claims
- 2988US7635292B2Substrate holding device and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 22, 2009·13 cites·13 claims
- 3087US11958163B2Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membraneEBARA CORP·Filed 2021·Granted Apr 16, 2024·1 cites·16 claims
- 3186US7988537B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2008·Granted Aug 2, 2011·8 cites·12 claims
- 3286US7867063B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2009·Granted Jan 11, 2011·8 cites·20 claims
- 3385US10464185B2Substrate polishing method, top ring, and substrate polishing apparatusEBARA CORP·Filed 2017·Granted Nov 5, 2019·2 cites·8 claims
- 3485US7754365B2Membrane electrode assembly, method for manufacturing the same, and fuel cell including the sameSANYO ELECTRIC CO·Filed 2008·Granted Jul 13, 2010·6 cites·17 claims
- 3584USD766849SSubstrate retaining ringEBARA CORP·Filed 2013·Granted Sep 20, 2016·25 cites·1 claims
- 3684US9399277B2Polishing apparatus and polishing methodEBARA CORP·Filed 2015·Granted Jul 26, 2016·3 cites·10 claims
- 3783USD918161SElastic membraneEBARA CORP·Filed 2018·Granted May 4, 2021·1 cites·1 claims
- 3883US8845396B2Polishing apparatusNABEYA OSAMU·Filed 2011·Granted Sep 30, 2014·3 cites·7 claims
- 3983US7033260B2Substrate holding device and polishing deviceEBARA CORP·Filed 2002·Granted Apr 25, 2006·20 cites·42 claims
- 4082US7850509B2Substrate holding apparatusEBARA CORP·Filed 2008·Granted Dec 14, 2010·5 cites·5 claims
- 4181US6346772B1Wiring substrate and gas discharge display device that includes a dry etched layer wet-etched first or second electrodesHITACHI LTD·Filed 2001·Granted Feb 12, 2002·13 cites·3 claims
- 4280US11088011B2Elastic membrane, substrate holding device, and polishing apparatusEBARA CORP·Filed 2018·Granted Aug 10, 2021·2 cites·13 claims
- 4380US10537975B2Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatusEBARA CORP·Filed 2016·Granted Jan 21, 2020·2 cites·22 claims
- 4479US10486284B2Substrate holding device, and substrate polishing apparatusEBARA CORP·Filed 2016·Granted Nov 26, 2019·1 cites·11 claims
- 4579USD808349SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2016·Granted Jan 23, 2018·18 cites·1 claims
- 4679US9308621B2Method and apparatus for polishing a substrateFUKUSHIMA MAKOTO·Filed 2009·Granted Apr 12, 2016·6 cites·30 claims
- 4779US9073170B2Polishing apparatus having thermal energy measuring meansEBARA CORP·Filed 2014·Granted Jul 7, 2015·2 cites·11 claims
- 4879US8267746B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2008·Granted Sep 18, 2012·5 cites·8 claims
- 4979US7967665B2Substrate holding apparatus, polishing apparatus, and polishing methodEBARA CORP·Filed 2007·Granted Jun 28, 2011·5 cites·9 claims
- 5078US6204681B1IC device contactorHITACHI ELECTR ENG·Filed 1999·Granted Mar 20, 2001·51 cites·6 claims
Showing the top 50 of 111 patent records by PatentIndex Score.
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