Inventor · disambiguated record
Eiji Takane
Also filed as: TAKANE EIJI
3 granted patents·1 pending application·254 citations·filing 1994–2001
76Inventor score
Technology areasG03F
Top patents by PatentIndex Score
4 records- 0194US5525808AAlignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positionsNIKON CORPORATON·Filed 1994·Granted Jun 11, 1996·205 cites·57 claims
- 0277US5408083AMethod of measuring the best focus position having a plurality of measuring mark images and a plurality of focus positionsNIKON CORP·Filed 1994·Granted Apr 18, 1995·36 cites·10 claims
- 0354US5475490AMethod of measuring a leveling planeNIKON CORP·Filed 1994·Granted Dec 12, 1995·13 cites·10 claims
- 0432US2002041377A1Aerial image measurement method and unit, optical properties measurement method and unit, adjustment method of projection optical system, exposure method and apparatus, making method of exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2001·Application pending·0 cites
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