Inventor · disambiguated record
Wakako Naito
Also filed as: NAITO WAKAKO
3 granted patents·2 pending applications·7 citations·filing 2000–2007
57Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0160US6780342B1Method of etching and method of plasma treatmentTOKYO ELECTRON LTD·Filed 2000·Granted Aug 24, 2004·7 cites·35 claims
- 0241US7943523B2Plasma etching method and computer readable storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted May 17, 2011·0 cites·10 claims
- 0340US7211197B2Etching method and plasma processing methodTOKYO ELECTRON LTD·Filed 2004·Granted May 1, 2007·0 cites·12 claims
- 0436US2005269294A1Etching methodTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0535US2006292876A1Plasma etching method and apparatus, control program and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →