Inventor · disambiguated record
George A. Kaplita
Also filed as: KAPLITA GEORGE A
6 granted patents·1 pending application·459 citations·filing 1985–2005
88Inventor score
Top patents by PatentIndex Score
7 records- 0193US4707218ALithographic image size reductionIBM·Filed 1986·Granted Nov 17, 1987·220 cites·20 claims
- 0292US4595484AReactive ion etching apparatusIBM·Filed 1985·Granted Jun 17, 1986·66 cites·20 claims
- 0385US4726879ARIE process for etching silicon isolation trenches and polycides with vertical surfacesIBM·Filed 1986·Granted Feb 23, 1988·79 cites·22 claims
- 0481US4871630AMask using lithographic image size reductionIBM·Filed 1987·Granted Oct 3, 1989·68 cites·2 claims
- 0568US6429067B1Dual mask process for semiconductor devicesIBM·Filed 2001·Granted Aug 6, 2002·15 cites·10 claims
- 0643US6328041B1Universal cleaning wafer for a plasma chamberIBM·Filed 1998·Granted Dec 11, 2001·11 cites·21 claims
- 0736US2007056927A1Process and system for etching doped siliconTSOU LEN Y·Filed 2005·Application pending·0 cites
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