Inventor · disambiguated record
Nicholas J. Giammarco
Also filed as: GIAMMARCO NICHOLAS J
4 granted patents·433 citations·filing 1985–1987
84Inventor score
Files withIBM4
Top patents by PatentIndex Score
4 records- 0193US4707218ALithographic image size reductionIBM·Filed 1986·Granted Nov 17, 1987·220 cites·20 claims
- 0292US4595484AReactive ion etching apparatusIBM·Filed 1985·Granted Jun 17, 1986·66 cites·20 claims
- 0385US4726879ARIE process for etching silicon isolation trenches and polycides with vertical surfacesIBM·Filed 1986·Granted Feb 23, 1988·79 cites·22 claims
- 0481US4871630AMask using lithographic image size reductionIBM·Filed 1987·Granted Oct 3, 1989·68 cites·2 claims
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