Inventor · disambiguated record
Brian Herbst
Also filed as: HERBST BRIAN · HERBST BRIAN W · HERBST BRIAN WAYNE
6 granted patents·1 pending application·182 citations·filing 1994–2003
87Inventor score
Files withIBM7
Top patents by PatentIndex Score
7 records- 0195US5607824AAntireflective coating for microlithographyIBM·Filed 1994·Granted Mar 4, 1997·61 cites·2 claims
- 0291US6207787B1Antireflective coating for microlithographyIBM·Filed 1998·Granted Mar 27, 2001·51 cites·7 claims
- 0377US6489857B2Multiposition micro electromechanical switchIBM·Filed 2000·Granted Dec 3, 2002·20 cites·10 claims
- 0475US5736301AMethod for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is usedIBM·Filed 1996·Granted Apr 7, 1998·20 cites·3 claims
- 0572US6831363B2Structure and method for reducing thermo-mechanical stress in stacked viasIBM·Filed 2002·Granted Dec 14, 2004·18 cites·15 claims
- 0667US6657305B1Semiconductor recessed mask interconnect technologyIBM·Filed 2000·Granted Dec 2, 2003·12 cites·13 claims
- 0740US2004051178A1Semiconductor recessed mask interconnect technologyIBM·Filed 2003·Application pending·0 cites
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