Inventor · disambiguated record
Shuzo Nagami
Also filed as: NAGAMI SHUZO
3 granted patents·11 pending applications·5 citations·filing 2003–2025
56Inventor score
Top patents by PatentIndex Score
14 records- 0151US6941956B2Substrate treating method and apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Sep 13, 2005·4 cites·6 claims
- 0250US2025279293A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 0348US2025246451A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 0448US2025246453A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 0544US7415985B2Substrate cleaning and drying apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Aug 26, 2008·1 cites·9 claims
- 0639US2008210261A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2008·Application pending·0 cites
- 0738US2006137726A1Substrate treating apparatusDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 0837US6902677B2Method of removing metal ion and apparatus for treating substrateDAINIPPON SCREEN MFG·Filed 2003·Granted Jun 7, 2005·0 cites·20 claims
- 0934US2004112410A1Substrate treating apparatus and substrate treating methodDAINIPPON SCREEN MFG·Filed 2003·Application pending·0 cites
- 1033US2006130880A1Substrate treating apparatus and methodDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 1133US2006112973A1Method and apparatus for substrate processingDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 1232US2005236018A1Substrate treating method and apparatusDAINIPPON SCREEN MFG·Filed 2005·Application pending·0 cites
- 1328US2004060505A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2003·Application pending·0 cites
- 1427US2005274401A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2003·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →