Inventor · disambiguated record
Shinichiro Koga
Also filed as: KOGA SHINICHIRO
29 granted patents·13 pending applications·562 citations·filing 1977–2024
97Inventor score
Top patents by PatentIndex Score
42 records- 0190US5848185AImage processing apparatus and methodCANON KK·Filed 1995·Granted Dec 8, 1998·189 cites·20 claims
- 0288US11061335B2Information processing apparatus, storage medium, lithography apparatus, lithography system, and article manufacturing methodCANON KK·Filed 2019·Granted Jul 13, 2021·3 cites·27 claims
- 0388US10996574B2Substrate processing apparatus, article manufacturing method, substrate processing method, substrate processing system, management apparatus, and storage mediumCANON KK·Filed 2020·Granted May 4, 2021·2 cites·14 claims
- 0484US7477390B2Exposure method and apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Jan 13, 2009·7 cites·15 claims
- 0579US5986766AAlignment method and alignment systemCANON KK·Filed 1997·Granted Nov 16, 1999·43 cites·11 claims
- 0678US6538260B1Position measuring method, and semiconductor device manufacturing method and apparatus using the sameCANON KK·Filed 2000·Granted Mar 25, 2003·16 cites·21 claims
- 0777US8305555B2Exposure apparatus, exposure method, and device manufacturing methodKOGA SHINICHIRO·Filed 2010·Granted Nov 6, 2012·4 cites·10 claims
- 0877US2025029276A1Measurement apparatus that measures position information of measurement target in predetermined directionCANON KK·Filed 2024·Application pending·0 cites
- 0973US6556711B2Image processing apparatus and methodCANON KK·Filed 1998·Granted Apr 29, 2003·78 cites·10 claims
- 1072US5832141AImage processing method and apparatus using separate processing for pseudohalf tone areaCANON KK·Filed 1997·Granted Nov 3, 1998·52 cites·35 claims
- 1169US9423700B2Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing methodCANON KK·Filed 2014·Granted Aug 23, 2016·1 cites·13 claims
- 1268US9261802B2Lithography apparatus, alignment method, and method of manufacturing articleCANON KK·Filed 2014·Granted Feb 16, 2016·1 cites·12 claims
- 1368US6661838B2Image processing apparatus for detecting changes of an image signal and image processing method thereforCANON KK·Filed 1996·Granted Dec 9, 2003·29 cites·6 claims
- 1468US6342703B1Exposure apparatus, exposure method, and device manufacturing method employing the exposure methodCANON KK·Filed 1999·Granted Jan 29, 2002·26 cites·20 claims
- 1566US12148181B2Measurement apparatus that measures position information of measurement target in predetermined directionCANON KK·Filed 2021·Granted Nov 19, 2024·0 cites·25 claims
- 1665US2024424718A1Molding system, molding method, and product manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 1764US4582662AProcess for producing a carbon fiber from pitch materialMITSUBISHI CHEM IND·Filed 1984·Granted Apr 15, 1986·12 cites·10 claims
- 1862US8384900B2Exposure apparatusCANON KK·Filed 2009·Granted Feb 26, 2013·1 cites·8 claims
- 1962US7990519B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2009·Granted Aug 2, 2011·1 cites·3 claims
- 2062US2024347344A1Planarization apparatus, planarization method, and product manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 2161US4661555APolycarbonate resin composition and process for its productionMITSUBISHI CHEM IND·Filed 1985·Granted Apr 28, 1987·13 cites·16 claims
- 2257US11721013B2Information processing apparatus, determination method, imprint apparatus, lithography system, article manufacturing method, and non-transitory computer-readable storage mediumCANON KK·Filed 2020·Granted Aug 8, 2023·0 cites·18 claims
- 2357US4839458APreparation with controlled amounts of polycarbonate carbon tetrachlorideMITSUBISHI CHEM IND·Filed 1987·Granted Jun 13, 1989·11 cites·10 claims
- 2457US2010002208A1Exposure method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 2557US2022412894A1Information processing apparatus and monitoring method for detecting abnormality of monitoring targetCANON KK·Filed 2022·Application pending·0 cites
- 2656US2023064237A1Imprint method, imprint apparatus, article manufacturing method, model, model generation method, and storage mediumCANON KK·Filed 2022·Application pending·0 cites
- 2755US6289136B1Image processing method and apparatusCANON KK·Filed 1996·Granted Sep 11, 2001·24 cites·57 claims
- 2854US9880475B2Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing methodCANON KK·Filed 2016·Granted Jan 30, 2018·0 cites·11 claims
- 2954US4810753AProcess for producing polyamideMITSUBISHI CHEM IND·Filed 1986·Granted Mar 7, 1989·8 cites·8 claims
- 3054US2007076197A1Exposure method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Application pending·0 cites
- 3152US2010104962A1Patterning method, exposure system, computer readable storage medium, and method of manufacturing deviceCANON KK·Filed 2009·Application pending·0 cites
- 3246US4158009AProcess for preparing 1,5-dinitroanthraquinoneMITSUBISHI CHEM IND·Filed 1977·Granted Jun 12, 1979·2 cites·9 claims
- 3343US6232978B1Image processing apparatus, and method of controlling same, using a combination of enlargement and fixed ratio reduction processingCANON KK·Filed 1995·Granted May 15, 2001·13 cites·29 claims
- 3443US2004046896A1Image processing apparatus and methodCANON KK·Filed 2003·Application pending·0 cites
- 3541US7315348B2Exposure apparatus, focal point detecting method, exposure method and device manufacturing methodCANON KK·Filed 2005·Granted Jan 1, 2008·0 cites·11 claims
- 3639US5974195AImage processing apparatus and methodCANON KK·Filed 1995·Granted Oct 26, 1999·17 cites·24 claims
- 3738US2011032506A1Exposure apparatus, system, updating method, and device manufacturing methodCANON KK·Filed 2010·Application pending·0 cites
- 3837US2010208228A1Exposure apparatus, exposure method, and device manufacturing methodCANON KK·Filed 2010·Application pending·0 cites
- 3937US2010309486A1Pattern transfer apparatus and method of manufacturing deviceCANON KK·Filed 2010·Application pending·0 cites
- 4036US6298156B1Image processing apparatus and methodCANON KK·Filed 1996·Granted Oct 2, 2001·7 cites·26 claims
- 4135US4937289AProcess for producing polyamideMITSUBISHI CHEM IND·Filed 1988·Granted Jun 26, 1990·2 cites·8 claims
- 4233US2011290136A1Lithographic apparatus and manufacturing method of commoditiesKOGA SHINICHIRO·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →