Inventor · disambiguated record
Yung-Chih Chang
Also filed as: CHANG YUNG-CHIH
4 granted patents·47 citations·filing 2004–2014
73Inventor score
Top patents by PatentIndex Score
4 records- 0187US7301603B2Exposure system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Nov 27, 2007·35 cites·23 claims
- 0268US8925290B2Mask storage device for mask haze prevention and methods thereofCHANG YUNG-CHIH·Filed 2011·Granted Jan 6, 2015·4 cites·19 claims
- 0358US7751908B2Method and system for thermal process controlTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Jul 6, 2010·8 cites·6 claims
- 0451US9527649B2Mask storage device for mask haze preventionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 27, 2016·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →