Inventor · disambiguated record
Yuya Toyoshima
Also filed as: TOYOSHIMA YUYA
5 granted patents·1 pending application·25 citations·filing 2002–2005
75Inventor score
Top patents by PatentIndex Score
6 records- 0172US7476856B2Sample dimension-measuring method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2004·Granted Jan 13, 2009·10 cites·2 claims
- 0262US7483560B2Method for measuring three dimensional shape of a fine patternHITACHI HIGH TECH CORP·Filed 2003·Granted Jan 27, 2009·10 cites·14 claims
- 0351US7038767B2Three-dimensional micropattern profile measuring system and methodHITACHI HIGH TECH CORP·Filed 2002·Granted May 2, 2006·3 cites·4 claims
- 0449US6894790B2Micropattern shape measuring system and methodHITACHI HIGH TECH CORP·Filed 2002·Granted May 17, 2005·2 cites·4 claims
- 0547US7130063B2Micropattern shape measuring system and methodHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 31, 2006·0 cites·6 claims
- 0639US2004147121A1Method and system for manufacturing a semiconductor deviceHITACHI LTD·Filed 2003·Application pending·0 cites
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