Inventor · disambiguated record

Frank D. Yasher

Also filed as: YASHER FRANK D

1 granted patent·72 citations·filing 1987–1987

51Inventor score

Technology areasG03F

Files withKLA INSTR CORP1

Top patents by PatentIndex Score

1 record

0186US4758094AProcess and apparatus for in-situ qualification of master patterns used in patterning systemsKLA INSTR CORP·Filed 1987·Granted Jul 19, 1988·72 cites·51 claims

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