Inventor · disambiguated record
Bao Ru Yang
Also filed as: YANG BAO R · YANG BAO-RU
5 granted patents·99 citations·filing 1996–1998
82Inventor score
Files withTAIWAN SEMICONDUCTOR MFG5
Top patents by PatentIndex Score
5 records- 0159US5639342AMethod of monitoring and controlling a silicon nitride etch stepTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jun 17, 1997·26 cites·22 claims
- 0259US5633210AMethod for forming damage free patterned layers adjoining the edges of high step height aperturesTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted May 27, 1997·27 cites·23 claims
- 0355US6227211B1Uniformity improvement of high aspect ratio contact by stop layerTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted May 8, 2001·23 cites·15 claims
- 0452US5904570AMethod for polymer removal after etchingTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted May 18, 1999·17 cites·7 claims
- 0536US5763316ASubstrate isolation process to minimize junction leakageTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jun 9, 1998·6 cites·13 claims
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