Inventor · disambiguated record
Yasuhiro Kishikawa
Also filed as: KISHIKAWA YASUHIRO
9 granted patents·1 pending application·59 citations·filing 2002–2009
86Inventor score
Top patents by PatentIndex Score
10 records- 0178US7095497B2Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatusCANON KK·Filed 2002·Granted Aug 22, 2006·16 cites·3 claims
- 0277US7180051B2Polarization state detecting system, light source, and exposure apparatusCANON KK·Filed 2005·Granted Feb 20, 2007·4 cites·5 claims
- 0373US7015456B2Exposure apparatus that acquires information regarding a polarization state of light from a light sourceCANON KK·Filed 2003·Granted Mar 21, 2006·11 cites·7 claims
- 0471US7251029B2Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatusCANON KK·Filed 2003·Granted Jul 31, 2007·12 cites·23 claims
- 0568US7286226B2Method and apparatus for measuring birefringenceCANON KK·Filed 2003·Granted Oct 23, 2007·8 cites·7 claims
- 0659US7161675B2Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatusCANON KK·Filed 2004·Granted Jan 9, 2007·4 cites·28 claims
- 0757US6992763B2Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatusCANON KK·Filed 2004·Granted Jan 31, 2006·4 cites·2 claims
- 0842US9164370B2Exposure apparatus and device manufacturing method using original with phase-modulation diffraction grating to form interference patternKISHIKAWA YASUHIRO·Filed 2009·Granted Oct 20, 2015·0 cites·14 claims
- 0942US7733461B2Exposure apparatusCANON KK·Filed 2006·Granted Jun 8, 2010·0 cites·10 claims
- 1040US2005185155A1Exposure apparatus and methodFiled 2005·Application pending·0 cites
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