Inventor · disambiguated record
Yoshinao Ito
Also filed as: ITO YOSHINAO
4 granted patents·91 citations·filing 1997–2002
78Inventor score
Top patents by PatentIndex Score
4 records- 0181US6447691B1Method for detecting end point of plasma etching, and plasma etching apparatusSEIKO EPSON CORP·Filed 1999·Granted Sep 10, 2002·40 cites·15 claims
- 0272US6440260B1Plasma monitoring method and semiconductor production apparatusSEIKO EPSON CORP·Filed 1999·Granted Aug 27, 2002·33 cites·17 claims
- 0356US6124410AMethod for purification of alpha-olefins for polymerization use and method for production of poly-alpha-olefinsMITSUI CHEMICALS INC·Filed 1997·Granted Sep 26, 2000·16 cites·5 claims
- 0454US6858446B2Plasma monitoring method and semiconductor production apparatusSEIKO EPSON CORP·Filed 2002·Granted Feb 22, 2005·2 cites·18 claims
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